JPH0426542U - - Google Patents
Info
- Publication number
- JPH0426542U JPH0426542U JP6764090U JP6764090U JPH0426542U JP H0426542 U JPH0426542 U JP H0426542U JP 6764090 U JP6764090 U JP 6764090U JP 6764090 U JP6764090 U JP 6764090U JP H0426542 U JPH0426542 U JP H0426542U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafer
- boat
- detecting
- reference member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 3
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764090U JP2522981Y2 (ja) | 1990-06-26 | 1990-06-26 | ウェーハボートの位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764090U JP2522981Y2 (ja) | 1990-06-26 | 1990-06-26 | ウェーハボートの位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426542U true JPH0426542U (en]) | 1992-03-03 |
| JP2522981Y2 JP2522981Y2 (ja) | 1997-01-22 |
Family
ID=31601387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6764090U Expired - Lifetime JP2522981Y2 (ja) | 1990-06-26 | 1990-06-26 | ウェーハボートの位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522981Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003273199A (ja) * | 2002-03-13 | 2003-09-26 | Hitachi Kokusai Electric Inc | 半導体製造装置に於ける基板保持具変形確認方法 |
-
1990
- 1990-06-26 JP JP6764090U patent/JP2522981Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003273199A (ja) * | 2002-03-13 | 2003-09-26 | Hitachi Kokusai Electric Inc | 半導体製造装置に於ける基板保持具変形確認方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2522981Y2 (ja) | 1997-01-22 |
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